2 papers
physics.optics2025
Prior-enhanced reflection spectra imaging with a white light interfermetry
Cheng Chen, Lixuan Xu, Rong Su
We present a simple but effective method to extract the reflectivity spectra from the interference signals with a large NA white light interferometry. Numerical simulations and exp…
physics.optics2025
Error Source Sensitivity Analysis in Model-Based Coherence Scanning Interferometry for Thin Film Metrology
Lixuan Xu, Cheng Chen, Rong Su
In semiconductor manufacturing processes, silicon dioxide films are commonly used as barrier layers, insulating layers, and protective layers. Coherence scanning interferometry (CS…