Ferroelectricity of Wurtzite Al${}_{1-x}$Hf${}_x$N Heterovalent Alloys

Nate S. P. Bernstein, Daniel Drury, Cheng-Wei Lee +11

Thin films of aluminum hafnium nitride (Al${}_{1-x}$Hf${}_x$N) were synthesized via reactive magnetron sputtering for Hf contents up to $x$ = 0.13. X-ray diffraction showed a single…