Defects and Oxygen Impurities in Ferroelectric Wurtzite Al${}_{1-x}$Sc${}_x$N Alloys

Naseem Ud Din, Cheng-Wei Lee, Geoff L. Brennecka +1

III-nitrides and related alloys are widely used for optoelectronics and as acoustic resonators. Ferroelectric wurtzite nitrides are of particular interest because of their potentia…