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electron beam radiolysis 1low temperature deposition 1molecular beam epitaxy 1thin film growth 1titanium dioxide 1

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cond-mat.mtrl-sci2026

Electron Beam Radiolysis-Assisted Growth of Rutile TiO2 Thin Films

Silu Guo, Nitin Sathish Kumar, Sreejith Nair +3

The paper introduces a method that uses electron‑beam radiolysis during molecular beam epitaxy to crystallize rutile TiO₂ thin films at much lower substrate temperatures, and demon…