Low-Loss Superconducting Resonators Fabricated from Tantalum Films Grown at Room Temperature

Guillaume Marcaud, David Perello, Cliff Chen +16

The use of $\hat{I}\pm$-tantalum in superconducting circuits has enabled a considerable improvement of the coherence time of transmon qubits. The standard approach to grow $\hat{I}\pm$-tantalum th…