Microfabrication of a 16 MHz 1D-pMUT-Array for photoacoustic and ultrasound imaging

Atheeth. S, Chandrashekar L N, Isha Munjal +3

In this paper, we describe the complete fabrication process of a 1D piezoelectric Micromachined Ultrasound Transducer (pMUT) array operating at 16 MHz underwater. We demonstrate th…