α-Ta (111) Thin Films for Qubit Applications: A Study of Thickness Dependence and Universal Scaling

Nate Price, Jose Gutiérrez, Sushant Padhye +8

We explore the growth of α-Ta thin films ranging from ultra-thin (2 nm) to thick (250 nm) films grown by sputter epitaxy on c-plane sapphire substrates. We utilized 100 W power wi…