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phononic devices 1piezoelectric coupling 1quantum acoustics 1silicon carbide 1superconducting circuits 1

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quant-ph2026

Towards a monolithic platform for coupling superconducting circuits to low-loss microwave phonons in AlScN on 4H-SiC

Yuanchen Deng, William W. Roberts, Sueli Skinner-Ramos +12

The paper presents a monolithic platform that integrates aluminum superconducting microwave resonators on silicon carbide with piezoelectric AlScN layers to enable low‑loss microwa…