High-performance Hybrid Lithium Niobate Electro-optic Modulators Integrated with Low-loss Silicon Nitride Waveguides on a Wafer-scale Silicon Photonics Platform

Arif Rahman, Forrest Valdez, Viphretuo Mere +3

Heterogeneously-integrated electro-optic modulators (EOM) are demonstrated using the hybrid-mode concept, incorporating thin-film lithium niobate (LN) by bonding with silicon nitri…