collaborators

1 paper

cond-mat.mtrl-sci2025

Metalorganic Chemical Vapor Deposition of AlScN Thin Films and AlScN/AlN/GaN Heterostructures

Vijay Gopal Thirupakuzi Vangipuram, Abdul Mukit, Kaitian Zhang +2

AlScN thin films were grown via metalorganic chemical vapor deposition (MOCVD), showing controllable incorporation of scandium (Sc) into the AlN lattices. Systematic variation of g…