From the 1 of 7 linked papers with an AI index.
7 papers
Thin Film AlN Microbolometer for Very Long-Wave Infrared Detection
Vivek Tallavajhula, Zarko Sakotic, Ian Anderson +3
The paper presents a suspended thin‑film aluminum nitride (AlN) microbolometer that exploits resonant phonon absorption near 15 µm for narrowband very long‑wave infrared detection,…
Phononic Combs in Lithium Niobate Acoustic Resonators
Ian Anderson, Jack Kramer, Tzu-Hsuan Hsu +3
Frequency combs consist of a spectrum of evenly spaced spectral lines. Optical frequency combs enable technologies ranging from timing, LiDAR, and ultra-stable signal sources. Micr…
62.6 GHz ScAlN Solidly Mounted Acoustic Resonators
Yinan Wang, Byeongjin Kim, Nishanth Ravi +13
We demonstrate a record-high 62.6 GHz solidly mounted acoustic resonator (SMR) incorporating a 67.6 nm scandium aluminum nitride (Sc0.3Al0.7N) piezoelectric layer on a 40 nm buried…
Uncooled low-noise thin-film optomechanical resonator for thermal sensing on lithium niobate
Yue Yu, Ran Yin, Ian Anderson +9
Optomechanical transduction harnesses the interaction between optical fields and mechanical motion to achieve sensitive measurement of weak mechanical quantities with inherently lo…
An 11.7-GHz ScAlN FBAR Filter: Case Study on Scaling Limits and Challenges
Sinwoo Cho, Byeongjin Kim, Lezli Matto +9
This paper reports an 11.7 GHz compact 50 ohm ladder filter based on single layer Scandium Aluminum Nitride (ScAlN) film bulk acoustic resonators (FBARs) with platinum (Pt) electro…
Thin-film scandium aluminum nitride bulk acoustic resonator with high Q of 208 and K2 of 9.5% at 12.5 GHz
Sinwoo Cho, Yinan Wang, Eugene Kwon +9
This work describes sputtered scandium aluminum nitride (ScAlN) thin-film bulk acoustic resonators (FBAR) at 12.5 GHz with high electromechanical coupling (k2) of 9.5% and quality…