Thermal Resilience of Suspended Thin-Film Lithium Niobate Acoustic Resonators up to 550 °C

Mihir Chaudhari, Naveed Ahmed, Vivek Tallavajhula +4

This paper reports a suspended thin-film lithium niobate (LN) piezoelectric resonator platform surviving high annealing temperatures of 550 °C, among the highest temperature at wh…