Role of seed layer in growing atomically flat TiTe2/Sb2Te3 heterostructure thin films at the wafer scale

Chao Nie, Xueyang Shen, Junying Zhang +8

Chalcogenide phase-change materials (PCMs) are a leading candidate for advanced memory and computing applications. Epitaxial-like growth of chalcogenide thin films at the wafer sca…