Mitigating parasitic contributions in measured piezoresponse for accurate determination of piezoelectric coefficients in Sc-alloyed-AlN thin films using piezo-response force microscopy

Ch Kishan Singh, K. Rajalakshmi, N. Balamurugan +4

We present a methodology to mitigate the effect of the parasitic electrostatic contribution usually present in piezoresponse force microscopy (PFM) measurement for quantitative cha…