2 papers
cond-mat.mes-hall2025
Enhanced Patterned Fluorescence from Polystyrene through Focused Electron Beam Irradiation under Various Gases
Deepak Kumar, Joseph W. Brill, J. Todd Hastings
We report on a novel method for tuning and enhancing fluorescence from irradiated polystyrene through electron-beam exposure in gaseous environments. We describe the effect of elec…
cond-mat.mes-hall2025
Enhancing Contrast and Resolution for Electron-beam Lithography on Insulating Substrates
Deepak Kumar, Cooper Meyers, RJ Smith +1
We report on the effect of ambient gas on the contrast and the resolution of electron beam lithography (EBL) in gaseous environments on insulating substrates. Poly(methyl methacryl…