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deep etching 1diamond membranes 1ICP-RIE 1quantum photonics 1room-temperature bonding 1

From the 1 of 1 linked paper with an AI index.

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1 paper

cond-mat.mtrl-sci2026

Scalable Fabrication of Diamond-on-Silica Heterostructures via High-Selectivity Deep ICP-RIE and Room-Temperature Bonding

R. Chembra Vasudevan, A. Hammouti, J. Le Pouliquen +4

The paper presents a method to fully etch thick, NV‑doped single‑crystal diamond membranes using a SiO₂ hard mask and deep ICP‑RIE, followed by room‑temperature bonding of the etch…