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annealing 1grain size 1graphene 1low-energy electron diffraction 1plasma-enhanced chemical vapor deposition 1sapphire substrate 1

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cond-mat.mtrl-sci2026

Spot Profile Analysis Low Energy Electron Diffraction of Plasma-Enhanced Chemical Vapor Deposition Grown Epitaxial Few-Layer Graphene on Sapphire

Niels Ganser, Marko A. Kriegel, Umut Kaya +6

The study applies high‑resolution spot‑profile analysis low‑energy electron diffraction (SPA‑LEED) to measure the grain size of plasma‑enhanced CVD grown few‑layer graphene on sapp…