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microwave circuits 1molecular beam epitaxy 1quantum devices 1superconducting resonators 1titanium nitride 1

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cond-mat.supr-con2026

High-Q superconducting microwave resonators using MBE titanium nitride

Anand Ithepalli, Haoran Lu, Eegene Clara Chung +9

The authors use molecular beam epitaxy to grow high-quality TiN thin films on sapphire, achieving very low X‑ray rocking curve widths and superconducting coplanar waveguide resonat…