4 papers
Surface Optimization of Superconducting Aluminum Resonators for Robust Quantum Device Fabrication
Simon J. K. Lang, Ignaz Eisele, Alwin Maiwald +8
The paper studies surface treatment methods for aluminum superconducting resonators to maintain low dielectric loss after a 24‑hour ambient exposure, finding that selective oxide r…
Stability studies on subtractively-fabricated CMOS-compatible superconducting transmon qubits
Chawki Dhieb, Johannes Weber, Samuel Taubenberger +12
Developing fault-tolerant quantum processors with error correction demands large arrays of physical qubits whose key performance metrics (coherence times, control fidelities) must…
CMOS-compatible processing and room-temperature characterization on wafer-level for scalable quantum computing
S. J. K. Lang, T. Mayer, J. Weber +10
We report on an industry-grade CMOS-compatible qubit fabrication approach using a CMOS pilot line, enabling a yield of functional devices reaching 92.8 %, with a resistance spread…
CMOS-Compatible, Wafer-Scale Processed Superconducting Qubits Exceeding Energy Relaxation Times of 200us
T. Mayer, J. Weber, E. Music +12
We present the results of an industry-grade fabrication of superconducting qubits on 200 mm wafers utilizing CMOS-established processing methods. By automated waferprober resistanc…