Nanocrystal Formation in Si Implanted Thin SiO2 Layers under the Influence of an Absorbing Interface

T. Mueller, K. -H. Heinig, W. Moeller

Kinetic 3D lattice Monte Carlo studies are presented on Si nanocrystal (NC) formation by phase separation in 1 keV Si implanted thin SiO2 films. The simulation start from Si depth…