Low-loss Sb${}_2$S${}_3$ Optical Phase Shifter Enabled by Optimizing Sputtering Conditions

Yuto Miyatake, Tomohiro Anda, Yosuke Wakita +6

By quantitatively evaluating the atomic concentrations of sputtered Sb${}_2$S${}_3$ films with different sputtering powers and Ar flows, we reveal that a sputtered Sb${}_2$S${}_3$ film bec…