41 citations · 69 across the 9 of their papers we have counts for
1 paper · 1 filter
John Hennessy, Christopher S. Moore, Kunjithapatham Balasubramanian +3
We report on the development and application of an atomic layer etching (ALE) procedure based on alternating exposures of trimethylaluminum and anhydrous hydrogen fluoride (HF) imp…