43 citations · 55 across the 4 of their papers we have counts for
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Kinetic Simulation of the Ideal Multipole Resonance Probe
Junbo Gong, Michael Friedrichs, Jens Oberrath +1
Active plasma resonance spectroscopy (APRS) is a process-compatible plasma diagnostic method which utilizes the natural ability of plasmas to resonate on or near the electron plasm…
The Multipole Resonance Probe: Simultaneous Determination of Electron Density and Electron Temperature Using Spectral Kinetic Simulation
Junbo Gong, Michael Friedrichs, Jens Oberrath +1
The investigation of the spectral kinetic model of the Multipole Resonance Probe (MRP) is presented and discussed in this paper. The MRP is a radio-frequency driven probe of the pa…
Kinetic investigation of the planar Multipole Resonance Probe in the low-pressure plasma
Chunjie Wang, Michael Friedrichs, Jens Oberrath +1
Active Plasma Resonance Spectroscopy (APRS) is a well-established plasma diagnostic method: a radio frequency signal is coupled into the plasma via a probe or antenna, excites it t…