3 papers
cond-mat.mtrl-sci2021
2D Nb-doped MoS: Tuning the Exciton Transitions and Application to p-type FETs
Baokun Song, Honggang Gu, Mingsheng Fang +5
Two-dimensional (2D) MoS has been intensively investigated for its use in the fields of microelectronics, nanoelectronics, and optoelectronics. However, intrinsic 2D MoS is…
physics.app-ph2019
Optical deep learning nano-profilometry
Jinlong Zhu, Yanan Liu, Sanyogita Purandare +3
Determining the dimensions of nanostructures is critical to ensuring the maximum performance of many geometry-sensitive nanoscale functional devices. However, accurate metrology at…
math.OC2019
Application of support vector machine for the fast and accurate reconstruction of nanostructures in optical scatterometry
Jinlong Zhu, Hao Jiang, Chuanwei Zhang +2
Nonlinear regression methods, such as local optimization algorithms, are widely used in the extraction of nanostructure profile parameters in optical scatterometry. The success of…