Growth and characterization of single crystal cubic TaN and hexagonal Ta${}_2$N films on c-plane Sapphire

Anand Ithepalli, Amit Rohan Rajapurohita, Arjan Singh +7

Two single crystal phases of tantalum nitride were stabilized on c-plane sapphire using molecular beam epitaxy. The phases were identified to be $\delta$-TaN with a rocksalt cubic struc…