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cond-mat.mtrl-sci2021
Research Data Infrastructure for High-Throughput Experimental Materials Science
Kevin R. Talley, Robert White, Nick Wunder +8
The High-Throughput Experimental Materials Database (HTEM-DB) is the endpoint repository for inorganic thin-film materials data collected during combinatorial experiments at the Na…
cond-mat.mtrl-sci2021★ 34 cited
Improving Reproducibility of Sputter Deposited Ferroelectric Wurtzite Al0.6Sc0.4N Films using In-situ Optical Emission Spectrometry
Daniel Drury, Keisuke Yazawa, Allison Mis +3
High-Sc Al1-xScxN thin films are of tremendous interest because of their attractive piezoelectric and ferroelectric properties, but overall film quality and reproducibility are wid…