most citedAn atomic force microscopy and optical microscopy study of various shaped void formation and reduction in 3C-SiC films grown on Si using chemical vapor deposition

21 citations · 21 across the 1 of their papers we have counts for

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cond-mat.mtrl-sci2019★ 21 cited

An atomic force microscopy and optical microscopy study of various shaped void formation and reduction in 3C-SiC films grown on Si using chemical vapor deposition

A. Gupta, J. Sengupta, C. Jacob

The formation of various uncommon shaped voids along with regular triangular and square voids in the epitaxial 3C-SiC films on Si has been investigated by optical microscopy and at…