most citedMorphological and electrical properties of Nickel based Ohmic contacts formed by laser annealing process on n-type 4H-SiC

44 citations · 44 across the 1 of their papers we have counts for

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1 paper

physics.app-ph2019★ 44 cited

Morphological and electrical properties of Nickel based Ohmic contacts formed by laser annealing process on n-type 4H-SiC

S. Rascunà, P. Badalà, C. Tringali +8

This work reports on the morphological and electrical properties of Ni-based back-side Ohmic contacts formed by laser annealing process for SiC power diodes. Nickel films, 100 nm t…