7 papers
Non-invasive monitoring of process-relevant plasma parameters by Fiber PROES in capacitively coupled Ar/CF plasmas
Florian Beckfeld, Maximilian Ryppa, Constantin Neuroth +3
Monitoring changes of process-relevant plasma parameters, such as the electron density and ion flux to the wafer, is essential for the development and control of plasma processes.…
Characterization of a laser filament-induced plasma in air at 10 kHz using optical emission spectroscopy
Malte C. Schroeder, Robin Löscher, Nikita Bibinov +4
The increasing availability of high-power Yb-based ultrafast laser-amplifier systems has opened the possibility of air filamentation at high repetition rates >1 kHz. In this new re…
Two-dimensional spatially resolved measurements of helium metastable densities by tunable diode laser absorption spectroscopy in atmospheric pressure RF plasma jets
David A Schulenberg, Xiao-Kun Wang, Mate Vass +3
Helium metastable species play a critical role in sustaining radio-frequency (RF) driven micro atmospheric pressure plasma jets through Penning ionization and for the generation of…
Synergistic control of radical generation in a radio frequency atmospheric pressure plasma jet via voltage waveform tailoring and structured electrodes
Mate Vass, Xiaokun Wang, Ihor Korolov +2
The synergy between voltage waveform tailoring and structured electrodes is investigated in a radio-frequency (RF) atmospheric-pressure microplasma jet operated in helium with a 0.…
Electronegativity effects on plasma dynamics in He/O RF microplasma jets at atmospheric pressure
Lukas Vogelhuber, Ihor Korolov, Mate Vass +6
This work investigates the transitions between ohmic mode and Penning-Gamma mode in a capacitively coupled radio frequency micro atmospheric pressure plasma jets (CCRF APPJ) op…
Overcoming Discharge Inhibition in n-Butane Oxidation: Two-Component BaTiO3 and Mn-Cu Mixed Oxide Coatings
Timothy Oppotsch, Christian Oberste-Beulmann, Alexander Böddecker +4
A twin surface dielectric barrier discharge on the microsecond scale was used in combination with a two-component coating to oxidize 300 ppm n-butane as a model volatile organic co…