activity
20182020
most citedBipolar High Power Impulse Magnetron Sputtering for energetic ion bombardment during TiN thin film growth without the use of a substrate bias

48 citations · 65 across the 4 of their papers we have counts for

collaborators

4 papers

cond-mat.mes-hall2020

Nanowire design by magnetic collection of Fe, Ni and/or FeNi-alloy nanoparticles

Sebastian Ekeroth, Robert Boyd, Nils Brenning +1

A method for growing nanoparticles with different elemental compositions simply by changing pulsing parameters in a power supply is demonstrated. The technique is based on high pow…

physics.app-ph2019★ 48 cited

Bipolar High Power Impulse Magnetron Sputtering for energetic ion bombardment during TiN thin film growth without the use of a substrate bias

Rommel Paulo B. Viloana, Jiabin Gub, Robert Boyda +3

The effect of applying a positive voltage pulse (Urev = 10 - 150 V) directly after the negative high power impulse magnetron sputtering (HiPIMS) pulse (bipolar HiPIMS) is investiga…

cond-mat.mtrl-sci2018

Low temperature (Ts/Tm < 0.1) epitaxial growth of HfN/MgO(001) via reactive HiPIMS with metal-ion synchronized substrate bias

Michelle Marie S. Villamayor, Julien Keraudy, Tetsuhide Shimizu +6

Low-temperature epitaxial growth of refractory transition-metal nitride thin films by means of physical vapor deposition has been a recurring theme in advanced thin-film technology…

cond-mat.mtrl-sci2018★ 17 cited

Nucleation of titanium nanoparticles in an oxygen-starved environment, I: Experiments

Rickard Gunnarsson, Nils Brenning, Robert Deric Boyd +1

A constant supply of oxygen has been assumed to be necessary for the growth of titanium nanoparticles by sputtering. This oxygen supply can arise from a high background pressure in…