48 citations · 48 across the 1 of their papers we have counts for
2 papers
physics.app-ph2019★ 48 cited
Bipolar High Power Impulse Magnetron Sputtering for energetic ion bombardment during TiN thin film growth without the use of a substrate bias
Rommel Paulo B. Viloana, Jiabin Gub, Robert Boyda +3
The effect of applying a positive voltage pulse (Urev = 10 - 150 V) directly after the negative high power impulse magnetron sputtering (HiPIMS) pulse (bipolar HiPIMS) is investiga…
cond-mat.mtrl-sci2018
Low temperature (Ts/Tm < 0.1) epitaxial growth of HfN/MgO(001) via reactive HiPIMS with metal-ion synchronized substrate bias
Michelle Marie S. Villamayor, Julien Keraudy, Tetsuhide Shimizu +6
Low-temperature epitaxial growth of refractory transition-metal nitride thin films by means of physical vapor deposition has been a recurring theme in advanced thin-film technology…