11 citations · 35 across the 13 of their papers we have counts for
4 papers · 1 filter
Characterization of Hydroxyls in Surface Oxide of Superconducting Tantalum and Their Mitigation in Quantum Circuits
Ekta Bhatia, Nicholas Pieniazek, Aleksandra Biedron +7
Recently, tantalum (Ta) has gained attention in superconducting quantum circuits due to the longer coherence times achieved when replacing niobium (Nb) in capacitor pads. Previous…
Tantalum Damascene Coplanar Waveguide Resonators Fabricated Using 300 mm Scale Processes
Ekta Bhatia, Yingge Du, Krishna P Koirala +12
Surface oxides contribute to losses in superconducting transmon devices resulting in degraded performance. We explore the use of the damascene process to replace the sidewall nativ…
Temperature-Dependent Dielectric Function of Tantalum Nitride Formed by Atomic Layer Deposition for Tunnel Barriers in Josephson Junctions
Ekta Bhatia, Aaron Lopez Gonzalez, Yoshitha Hettige +9
We report the dielectric functions of insulating tantalum nitride (TaN) films, deposited using atomic layer deposition (ALD) on 300 mm Si/SiO2 substrates, to demonstrate their suit…
Effects of Integrated Heatsinking on Superconductivity in Tantalum Nitride Nanowires at the 300 Millimeter Scale
Ekta Bhatia, Tharanga R. Nanayakkara, Chenyu Zhou +14
We report the superconducting properties of tantalum nitride (TaN) nanowires and TaN/copper (TaN/Cu) bilayer nanowires fabricated on 300 mm silicon wafers using CMOS-compatible pro…