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physics.app-ph2023★ 11 cited
Engineering of Niobium Surfaces Through Accelerated Neutral Atom Beam Technology For Quantum Applications
Soumen Kar, Conan Weiland, Chenyu Zhou +16
A major roadblock to scalable quantum computing is phase decoherence and energy relaxation caused by qubits interacting with defect-related two-level systems (TLS). Native oxides p…
physics.app-ph2023★ 11 cited
Chemical Mechanical Planarization for Ta-based Superconducting Quantum Devices
Ekta Bhatia, Soumen Kar, Jakub Nalaskowski +9
We report on the development of a chemical mechanical planarization (CMP) process for thick damascene Ta structures with pattern feature sizes down to 100 nm. This CMP process is t…