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physics.plasm-ph2026
Revisiting Electron Heating in Capacitively Coupled Plasma (CCP) Discharges: A Nonlinear Dynamics Perspective
Rishabh Singh, Sarveshwar Sharma, Bhooshan Paradkar +1
Despite decades of research, the electron heating mechanisms in capacitively coupled plasma (CCP) discharges over a wide range of operating conditions is not fully understood. Alth…
physics.plasm-ph2026
Collisionless Bulk Electron Heating in Resonant Low-Voltage Capacitively Coupled Plasmas
Sarveshwar Sharma, Igor D. Kaganovich, Animesh Kuley +3
We investigate collisionless power absorption in resonant, lowpressure capacitively coupled plasmas (CCPs). In these radio-frequency (RF) discharges, the sheath capacitance almo…