Phase shifting Interferometry and Wavefront Compensation using Liquid Crystal on Silicon (LCOS) Spatial Light Modulator (SLM)

Indrani Bhattacharya, Marcus Petz, Rainer Tutsch

We present a simple and novel technique for interferometric surface measurement using a Liquid Crystal on Silicon (LCOS) Spatial Light Modulator (SLM) as phase shifter and wavefron…