Laser-Based Fabrication of Microstructures on Nickel Thin Films and Its Applications in On-Chip Thin Film Inductors

Srikanth Itapu, Vamsi Borra, Daniel G. Georgiev

This work reports on the fabrication of microbump structures on Ni films by single-pulse, localized laser irradiation. Conditions for the reproducible formation of such microstruct…