Electron beam irradiation-induced transport and recombination in p-type Gallium Oxide grown on (001) \b{eta}-Ga2O3 substrate

Gabriel Marciaga, Jian-Sian Li, Chao-Ching Chiang +9

This study investigates minority electron diffusion length and carrier recombination phenomena within p-type, 300 nm-thick Ga2O3 epitaxial films. Utilizing Electron Beam-Induced Cu…