most citedEffects of thermal annealing on thermal conductivity of LPCVD silicon carbide thin films

1 citations · 1 across the 1 of their papers we have counts for

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cond-mat.mtrl-sci2023★ 1 cited

Effects of thermal annealing on thermal conductivity of LPCVD silicon carbide thin films

Lei Tang, Chris Dames

The thermal conductivity (k) of polycrystalline silicon carbide thin films is relevant for thermal management in emerging silicon carbide applications like MEMS and optoelectronic…