Co-sputtered MoRe thin films for carbon nanotube growth-compatible superconducting coplanar resonators

K. J. G. Götz, S. Blien, P. L. Stiller +7

Molybdenum rhenium alloy thin films can exhibit superconductivity up to critical temperatures of $T_c=15\mathrm{K}$. At the same time, the films are highly stable in the high-tempe…