N2-H2 capacitively coupled radio-frequency discharges at low pressure. Part I. Experimental results: effect of the H2 amount on electrons, positive ions and ammonia formation

Audrey Chatain, Miguel Jiménez-Redondo, Ludovic Vettier +5

The mixing of N2 with H2 leads to very different plasmas from pure N2 and H2 plasma discharges. Numerous issues are therefore raised involving the processes leading to ammonia (NH3…