31 citations · 74 across the 8 of their papers we have counts for
3 papers · 1 filter
Using top graphene layer as sacrificial protection during dielectric atomic layer deposition
Xiaohui Tang, Nicolas Reckinger, Olivier Poncelet +5
We investigate the structural damage of graphene underlying dielectrics (HfO2 and Al2O3) by remote plasma-enhanced atomic layer deposition (PE-ALD). Dielectric film is grown on bil…
Self-Formation of Sub-10-nm Nanogaps by Silicidation for Resistive Switch in Air
Xiaohui Tang, Laurent A. Francis, Constantin Augustin Dutu +2
We developed a simple and reliable method for the fabrication of sub-10-nm wide nanogaps. The self-formed nanogap is based on the stoichiometric solid-state reaction between metal…
Energy-band engineering for improved charge retention in fully self-aligned double floating-gate single-electron memories
Xiaohui Tang, Christophe Krzeminski, Aurélien Lecavelier des Etangs-Levallois +9
We present a new fully self-aligned single-electron memory with a single pair of nano floating gates, made of different materials (Si and Ge). The energy barrier that prevents stor…