most citedCapacitively-coupled rf discharge with a large amount of microparticles: spatiotemporal emission pattern and microparticle arrangement

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physics.plasm-ph2017★ 15 cited

Capacitively-coupled rf discharge with a large amount of microparticles: spatiotemporal emission pattern and microparticle arrangement

M. Y. Pustylnik, I. L. Semenov, E. Zähringer +1

The effect of micron-sized particles on a low-pressure capacitively-coupled rf discharge is studied both experimentally and using numerical simulations. In the laboratory experimen…