2 citations · 3 across the 2 of their papers we have counts for
2 papers
eess.IV2023★ 2 cited
Wavelength-multiplexed Multi-mode EUV Reflection Ptychography based on Automatic-Differentiation
Yifeng Shao, Sven Weerdenburg, Jacob Seifert +3
Ptychographic extreme ultraviolet (EUV) diffractive imaging has emerged as a promising candidate for the next-generation metrology solutions in the semiconductor industry, as it ca…
physics.optics2017★ 1 cited
Spatial coherence measurement and partially coherent diffractive imaging
Yifeng Shao, Xingyuan Lu, Sander Konijnenberg +3
The complete characterization of spatial coherence is difficult because the mutual coherence function is a complex-valued function of four independent variables. This difficulty li…