87 citations · 385 across the 12 of their papers we have counts for
Showing 2021Show all
2 papers · 1 filter
cond-mat.mtrl-sci2021★ 34 cited
Improving Reproducibility of Sputter Deposited Ferroelectric Wurtzite Al0.6Sc0.4N Films using In-situ Optical Emission Spectrometry
Daniel Drury, Keisuke Yazawa, Allison Mis +3
High-Sc Al1-xScxN thin films are of tremendous interest because of their attractive piezoelectric and ferroelectric properties, but overall film quality and reproducibility are wid…
cond-mat.mtrl-sci2021★ 87 cited
Reduced Coercive Field in Epitaxial Thin Film of Ferroelectric Wurtzite Al0.7Sc0.3N
Keisuke Yazawa, Daniel Drury, Andriy Zakutayev +1
The first epitaxial ferroelectric wurtzite film with clear polarization-electric field hysteresis behavior is presented. The coercive field of this epitaxial Al0.7Sc0.3N film on W/…