90 citations · 508 across the 28 of their papers we have counts for
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A tabletop x-ray tomography instrument for nanometer-scale imaging: demonstration of the 1,000-element transition-edge sensor subarray
Paul Szypryt, Nathan Nakamura, Daniel T. Becker +28
We report on the 1,000-element transition-edge sensor (TES) x-ray spectrometer implementation of the TOMographic Circuit Analysis Tool (TOMCAT). TOMCAT combines a high spatial reso…
Design of a 3000-pixel transition-edge sensor x-ray spectrometer for microcircuit tomography
Paul Szypryt, Douglas A. Bennett, William J. Boone +28
Feature sizes in integrated circuits have decreased substantially over time, and it has become increasingly difficult to three-dimensionally image these complex circuits after fabr…
Nanoscale Three-Dimensional Imaging of Integrated Circuits using a Scanning Electron Microscope and Transition-Edge Sensor Spectrometer
Nathan Nakamura, Paul Szypryt, Amber L. Dagel +30
X-ray nanotomography is a powerful tool for the characterization of nanoscale materials and structures, but is difficult to implement due to competing requirements on X-ray flux an…
The potential of microcalorimeter x-ray spectrometers for measurement of relative fluorescence-line intensities
J. W. Fowler, L. Miaja-Avila, G. C. O'Neil +3
We have previously used an array of cryogenic microcalorimeters with 4 eV energy resolution to measure emission-line profiles and energies of the characteristic L-shell x rays of f…
Absolute Energy Measurements with Superconducting Transition-Edge Sensors for Muonic X-ray Spectroscopy at 44 keV
Daikang Yan, Joel C. Weber, Tejas Guruswamy +25
Superconducting transition-edge sensor (TES) microcalorimeters have great utility in x-ray applications owing to their high energy resolution, good collecting efficiency and the fe…
Energy calibration of nonlinear microcalorimeters with uncertainty estimates from Gaussian process regression
J. W. Fowler, B. K. Alpert, G. C. O'Neil +2
The nonlinear energy response of cryogenic microcalorimeters is usually corrected through an empirical calibration. X-ray or gamma-ray emission lines of known shape and energy anch…