2 papers
physics.app-ph2018
Large-Scale Fabrication of RF MOSFETs on Liquid-Exfoliated MoS2
Kuanchen Xiong, Lei Li, Asher Madjar +7
For the first time, thousands of RF MOSFETs were batch-fabricated on liquid-exfoliated MoS2 below 300 °C with nearly 100% yield. The large-scale fabrication with high yield allowed…
physics.app-ph2017
Scanning Microwave Microscopy of Aluminum CMOS Interconnect Lines Buried in Oxide and Water
Xin Jin, Kuanchen Xiong, Roderick Marstell +6
Using a scanning microwave microscope, we imaged in water aluminum interconnect lines buried in aluminum and silicon oxides fabricated through a state-of-the-art 0.13 um SiGe BiCMO…