130 citations · 203 across the 5 of their papers we have counts for
1 paper · 2 filters
Piotr Jacek Cegielski, Jens Bolten, Jung Wuk Kim +5
In this work multilevel pattering capabilities of Substrate Conformal Imprint Lithography (SCIL) have been explored. A mix & match approach combining the high throughput of nanoimp…