Simplified Aluminum Nitride Processing for Low-Loss Integrated Photonics and Nonlinear Optics

Haochen Yan, Shuangyou Zhang, Arghadeep Pal +12

Aluminum nitride (AlN) is an extremely promising material for integrated photonics because of the combination of strong \c{hi}2 and \c{hi}3 nonlinearities. However, the intrinsic h…