31 citations · 70 across the 5 of their papers we have counts for
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physics.atom-ph2014★ 18 cited
Performance predictions for a laser intensified thermal beam for use in high resolution Focused Ion Beam instruments
S. H. W. Wouters, G. ten Haaf, R. P. M. J. W. Notermans +4
Photo-ionization of a laser-cooled and compressed atomic beam from a high-flux thermal source can be used to create a high-brightness ion beam for use in Focus Ion Beam (FIB) instr…
physics.acc-ph2014★ 31 cited
Performance predictions of a focused ion beam from a laser cooled and compressed atomic beam
G. ten Haaf, S. H. W. Wouters, S. B. van der Geer +2
Focused ion beams are indispensable tools in the semiconductor industry because of their ability to image and modify structures at the nanometer length scale. Here we report on per…