28 citations · 89 across the 13 of their papers we have counts for
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physics.optics2022
The method of solving initial structure by Seidel aberration theory for extreme ultraviolet lithography objective
Wei Tan, Donglin Ma
In this paper, a method for solving the initial structure of an off-axis multi-mirror system applied to extreme ultraviolet (EUV) lithography using a paraxial ray-tracing algorithm…
physics.optics2022★ 28 cited
Recommended high performance telescope system design for the TianQin project
Zichao Fan, Lujia Zhao, Jianguo Peng +6
China is planning to construct a new space-borne gravitational-wave (GW) observatory, the TianQin project, in which the spaceborne telescope is an important component in laser inte…